Electronic commerce method for semiconductor products, electronic commerce thereof, production system, production method, production equipment design system, production equipment design method, and production equipment manufacturing method

ABSTRACT

An electronic commerce for semiconductor products comprises a network, a client terminal, a connection server, a virtual production line, and a real production line. The real production line actually manufactures semiconductor products. The virtual production line provides a computer with substantially the same functions as the real production line and computes an optimal lot progress. The connection server connects the virtual production line to the client terminal via the network. When a condition is entered from the client terminal, the connection server transfers this condition to the virtual production line. Simulation is performed realtime for determining whether a product flows in the virtual production line under the transferred condition. The connection server transfers a simulation result to the client terminal. Based on the simulation result, a electronic commerce is conducted.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is based upon and claims the benefit of priority fromthe prior Japanese Patent Applications No. 2000-163042, filed May 31,2000; and No. 2000-163043, filed May 31, 2000, the entire contents ofboth of which are incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to an electronic commerce method andsystem for semiconductor products in case of conducting electroniccommerce for semiconductor products via a network and a productionsystem, a production method, a production equipment design system, aproduction equipment design method, and a production equipmentmanufacturing method for effective operations in a factory.

2. Description of the Related Art

Conventionally, a typical semiconductor factory monthly producesgeneral-purpose products such as memory chips on the basis of severalthousand lots. A production line includes too many lots and requires along period of production. Because of this, it has been difficult toestimate the completion of the product after it went into production.Even in this situation, general-purpose products need not be especiallyconsidered regarding input of a lot in accordance with the deliverytime, causing no serious problems. Generally, one lot can take in about25 to 50 wafers. Of course, the lot can take in about 1 to 50 or 100wafers.

On the other hand, a semiconductor factory in a SOC (System On Chip) ageis considered to chiefly produce system LSI chips on a scale of severalhundred lots as a monthly production in accordance with customerrequests. Such a small-scale factor (hereafter referred to as themini-fab) needs to input a necessary amount of lots and follow thedelivery time by conducting a proper lot progress management. Further,it is necessary to determine whether it is possible to actuallymanufacture the product in accordance with customer requests such asspecification, quantity, delivery time, price, and the like.

However, it has been difficult for conventional mini-fabs to strictlycontrol the lot progress management and to correctly estimate whetherthe product can be manufactured by following the delivery time. Insemiconductor products such as LSI chips, it is considered todrastically increase business opportunities by constructing anelectronic commerce using networks such as Internet. However, since itis difficult to conduct the lot progress management and estimate theproduct manufacturing, it has been very difficult to implement anelectronic commerce for these semiconductor products.

Hence, it has been difficult for conventional semiconductor factories toestimate whether it is possible to conduct the lot progress managementand manufacture product. This has been a cause of losing businessopportunities for mini-fabs in a SOC age.

Generally, conventional typical semiconductor factories use as many asdozens of apparatuses for the same purpose at various processes. Thesame type of apparatuses process many lots, making it difficult tocontrol a flow of lots. As a system for controlling a flow of lots,there is provided the software called “ManSim” from TYECIN Systems, Inc.Input information includes apparatuses used for each process of aproduct, processing times, apparatus groups, and the like. Lots areallowed to flow on a computer virtually. The system aims at controllinga flow of lots, optimizing production lines, and conducting productionscheduling.

To optimize production lines and conduct production scheduling, it isnecessary to transfer various information such as lot progressinformation on an actual production line, information about apparatusstates, product's process information, and the like to a computersystem. A progress estimate is computed through the use of these typesof information as input data. The resulting information needs to betransferred to the actual production line as a work instruction.However, on a large-scale production system characterized by a monthlyproduction of several thousand lots, the progress estimate is computedby simplifying various processes due to restrictions on computerthroughput. Accordingly, such a system does not necessarily conductaccurate simulation.

A similar method is proposed in Jpn. Pat. Appln. KOKAI Publication No.10-207506. The manufacturing management system proposed thereinexchanges trial production system information via shared information anduses a result of the simulation to manage a manufacturing process forthe production or trial production. According to this technique, acomputer system chiefly contains a device simulation function, a processsimulation function, circuit, shape, logic simulations functions, andthe like, but not a simulation function for flowing lots. This has beenthe problem of not estimating a lot flow.

FIG. 1 exemplifies a result of computing a throughput and a work periodby using ManSim. In this figure, the abscissa axis shows the number oflots (work in process: WIP) within a production line. The ordinate axisshows the throughput (monthly quantity of output) and the work period.Solid lines indicates results of computing a throughput and a workperiod, and a dotted line indicates actual result of a throughput forreference. According to this figure, when the WIP is small, thethroughput is proportional to the WIP and the work period remainsconstant. This state causes little wait conditions in a lot. When theWIP increases, the throughput gradient decreases gradually, and finallybecomes a constant value. It is known that this throughput correspondsto the throughput of a bottlenecked apparatus. Within this region, thework period increases in proportion to the WIP.

Increasing productivity of the production line requires increasing thethroughput and shortening the work period. Shortening the work periodneeds to decrease the number of waiting lots. In this figure, the WIPneeds to be set approximately to value A. However, this is not practicalbecause the throughput is too small. By contrast, increasing the WIPapproximate to value C in the figure maximizes the throughput, butlengthens the work period. Accordingly, it is considered to beappropriate for operations to use values approximate to B in the figure.

As indicated with a broken line in FIG. 1, however, the throughput andproductivity decreases due to maintenance or failures of apparatuses,inconsistent arrival of products to a bottlenecked apparatus, and thelike. To prevent the throughput from decreasing, it is necessary toaccurately predict the progress of lots and conduct optimal processingfor increasing the throughput and shortening the work period. Asmentioned above, however, a large-scale production system must simplifyvarious processes for computation due to restrictions on computerthroughput. It has been difficult to accurately estimate the progress oflots.

Besides, several choices may occur when a certain apparatus processeslots. For example, it is assumed that there is provided a batchapparatus which can process a plurality of lots at a time. When a givenlot waits for processing, it is necessary to determine whether toprocess that lot immediately or to wait until another lot arrives. On agiven apparatus, a lot with a low priority waits and a lot with a highpriority is expected to occur after a specified time. In this case, itis necessary to determine whether to process the low-priority lot firstor to process the high-priority lot first by suspending the low-prioritylot. In addition, when there is provided a continuous process such aspre-treatment, oxidation (or CVD), and then post-treatment within 24hours, it is necessary to determine at which timing the processingshould start.

There may be a variety of methods for selecting an optimal one from aplurality of choices as mentioned above depending on situations.Above-mentioned ManSim uniquely determines a rule for selecting choicesand computes a lot progress under the corresponding condition. When theabove-mentioned choices occur, ManSim is incapable of such computation,also offering a serious problem to be solved.

As described above, various processes need to be simulated in actualproduction line for optimizing semiconductor production line andscheduling the production. The actual situation is that variousprocesses are simplified for computation due to restrictions on thecomputer throughput. Accurate simulation has been difficult. For thisreason, it has been difficult to accurately estimate a lot progress. Amethod of selecting optimal one from a plurality of choices depends onsituations. A prior art makes it difficult to select an optimal choice.

BRIEF SUMMARY OF THE INVENTION

It is an object of the present invention to provide an electroniccommerce method and a system thereof capable of lot progress managementand correctly determining possibilities of product manufacturing therebyexpanding business opportunities.

It is another object of the present invention to provide a productionsystem, production method, production equipment design system,production equipment design method, and production equipmentmanufacturing method capable of accurately simulating various processesin an actual production line and implementing effective operationsespecially in a relatively small-scale factory.

For the above-mentioned problems, one embodiment of the presentinvention provides the following configurations.

Namely, one embodiment of the present invention provides an electroniccommerce method for an agent manufacturing or selling semiconductorproducts and a purchaser purchasing semiconductor products to conduct anelectronic commerce, the method comprising the steps of: connecting aclient terminal used by a purchaser or his or her proxy to a virtualproduction line so constructed as to simulate production processes in areal production line for manufacturing semiconductor products on acomputer; receiving a purchaser-requested condition for apurchaser-requested product from the client terminal; simulatingrealtime whether the purchaser-requested product flows on a virtualproduction line according to a purchaser-requested condition; anddetermining whether a product is manufactured according to apurchaser-requested condition.

Besides, another embodiment of the present invention provides anelectronic commerce method for an agent manufacturing or sellingsemiconductor products and a purchaser purchasing semiconductorproducts, to conduct an electronic commerce by using a network, themethod comprising the steps of: connecting via network a client terminalused by a purchaser or his or her proxy to a virtual production line soconstructed as to simulate production processes in a real productionline for manufacturing semiconductor products on a computer; inputting apurchaser-requested product and conditions from the client terminal andtransferring this input information to the virtual production line;simulating realtime whether a product flows on the virtual productionline according to a purchaser-requested condition based on the productand conditions input to the virtual production line; transferring asimulation result in the virtual production line to the client terminal;determining whether to effectuate a business transaction from the clientterminal in response to a result of the simulation; and issuing aninstruction for manufacturing semiconductor products from the virtualproduction line to the real production line.

Still another embodiment of the present invention provides an electroniccommerce method concerning semiconductor products for a purchaserpurchasing semiconductor products to have electronic commerce with anagent manufacturing or selling semiconductor products by using anetwork, the method comprising the steps of: connecting via network aclient terminal used by a purchaser or his or her proxy to a virtualproduction line so constructed as to simulate production processes in areal production line for manufacturing semiconductor products on acomputer; inputting a product to be purchased and conditions thereoffrom the client terminal; receiving a result of simulating realtime atthe client terminal whether a product flows on the virtual productionline according to a purchaser-requested condition based on the inputproduct and conditions; and responding whether to purchase asemiconductor product from the client terminal in response to thereceived simulation result.

Still yet another embodiment of the present invention provides anelectronic commerce method concerning semiconductor products for anagent manufacturing or selling semiconductor products to have electroniccommerce with a purchaser purchasing semiconductor products by using anetwork, the method comprising the steps of: connecting via network aclient terminal used by a purchaser or his or her proxy to a virtualproduction line so constructed as to simulate production processes in areal production line for manufacturing semiconductor products on acomputer; receiving a product and conditions at the virtual productionline input from the client terminal; simulating realtime whether aproduct flows on the virtual production line according to apurchaser-requested condition based on the product and conditionstransferred to the virtual production line; transferring a result of thesimulation to the client terminal; determining whether a transaction iseffectuated according to a response from the client terminal based onthe simulation result; and issuing an instruction for semiconductorproduct manufacturing from the virtual production line to the realproduction line when a transaction is effectuated according to thedetermination.

Yet still another embodiment of the present invention provides anelectronic commerce system, comprising: a virtual production line soconstructed as to simulate production processes in a real productionline for actually manufacturing semiconductor products on a computer;and a connection server for connecting the virtual production line to aclient terminal via a network, wherein: the connection server transfersconditions input from the client terminal to the virtual production lineand transfers to the client terminal a result of realtime simulationwhether a product flows on the virtual production line according to atransferred condition.

Still yet another embodiment of the present invention provides anelectronic commerce system, comprising: a virtual production lineproviding a computer with substantially the same functions as for a realproduction line actually manufacturing products; first transferringmeans configured to transfer various information about the realproduction line to the virtual production line; computing meansconfigured to compute an optimal lot progress on the virtual productionline based on the transferred information; second transferring meansconfigured to transfer work instruction data based on a result of thecomputation to the real production line; and a connection serverconfigured to connect the virtual production line to a client terminalvia a network, wherein: conditions input from the client terminal aretransferred to the virtual production line via the connection servertransfers; realtime simulation is performed to determine whether aproduct flows on a virtual production line under transferred conditions;a simulation result is transferred to the client terminal via theconnection server; and a transaction is effectuated based on asimulation result.

In the above embodiments of the present invention, a user such as asales representative or a customer connects to a virtual production linevia network. The user inputs a specified LSI product name,specification, delivery time, price, and the like and simulates whethersuch a product can be manufactured on the virtual production line. Whena result from the simulation shows that the product can be manufactured,a transaction is initiated and a work instruction is issued to an actualproduction line. Even when a result from the simulation shows that theproduct cannot be manufactured, the user can change the semiconductorproduct's specification, quantity, delivery time, price, and the like.When an acceptable solution is obtained, a transaction is initiated anda work instruction is issued to an actual production line.

Here, the virtual production line is designed to use a computer forsimulating production processes in an actual production line whichmanufactures semiconductor products. A simulation using the virtualproduction line makes it possible to correctly determine possibilitiesof managing a lot progress and manufacturing the product on the actualproduction line. Consequently, this allows mini-fabs in the SOC age toeffectuate the electronic commerce for semiconductor products andenlarge business opportunities.

Yet still another embodiment of the present invention provides aproduction system, comprising: a virtual production line providing acomputer with substantially the same functions as for a real productionline actually manufacturing products; receiver configured to receivevarious information about the real production line by using the virtualproduction line; computing means configured to compute an optimal lotprogress on the virtual production line based on the receivedinformation; and transferring means configured to transfer workinstruction data based on a result of the computation to the realproduction line.

Still yet another embodiment of the present invention provides amanufacturing method of using a virtual production line provided withsubstantially the same functions in a computer as for a real productionline actually manufacturing products, performing simulation in a virtualproduction line, and enabling efficient operations in a real productionline, the method comprising the steps of: receiving various informationabout the real production line by means of the virtual production line;computing an optimal lot progress in the virtual production line basedon the received information; and transferring work instruction databased on a result of the computation to the real production line.

The above described embodiment of the present invention provides avirtual factory (virtual production line) for virtually manufacturingproducts including trial products The virtual factory aims ateffectively operating the production line in a factory, especially arelatively small-scale semiconductor factory (actual production linereferred to as a mini-fab) whose monthly production is several thousandlots or less. There are provided lot progress information from an actualproduction line actually manufacturing products and information aboutapparatus situations. These pieces of information are transferred to thevirtual production line. A lot progress estimate is computed using inputdata including these pieces of information and product processinformation maintained in the virtual production line. As an output, thecomputation result includes information about an optimal processing lot,order, and the like. The output is transferred to the actual productionline as a work instruction.

During computation of the lot progress estimate using lot progressinformation, information about apparatus situations, and product'sprocess information as input data, several choices may occur when agiven apparatus processes lots. For example, it is assumed that there isprovided a batch apparatus which can process a plurality of lots at atime. When a given lot waits for processing, it is necessary todetermine whether to process that lot immediately or to wait untilanother lot arrives. When another lot is expected to arrive soon, it isconsidered to be beneficial to await that lot. When another lot is notexpected to arrive soon, it is considered to be beneficial to processthe current lot only. Accordingly, an optimal processing method isconsidered to vary with situations. On a given apparatus, a lot with alow priority waits and a lot with a high priority is expected to occurafter a specified time. In this case, it is necessary to determinewhether to process the low-priority lot first or to suspend it.

The above embodiment of the present invention computes all or part ofthese various choices. When there is a plurality of choices, a lotprogress is estimated with respect to all or partial combinations ofthese choices. This operation is performed during a computation timespecified by the input data.

There are several to dozens of apparatuses of the same type in alarge-scale semiconductor factory which monthly produces approximatelyfifty to sixty thousand wafers or more. The above-mentioned combinationsnecessitate a great amount of computations. Practically, it has beendifficult to perform such computations. By contrast, at least one or upto several apparatuses of the same type are used in asemiconductor-factory which monthly produces several thousand wafers orless. There are provided apparatuses which easily cause a plurality ofchoices such as apparatuses for charging a plurality of lots. Theseapparatuses occupy one third or less of the whole. A chance of makingchoices is smaller than the large-scale semiconductor factory whichmonthly produces approximately fifty to sixty thousand wafers or more.Accordingly, the number of combinations decreases, making it possible toextend the time for lot progress computation.

More specifically, a conventional large-scale factory just computes aprogress for, say, 10 minutes due to restriction of a computer. Bycontrast, a mini-fab according to the present invention can compute aprogress for, say, a week using the same computer, ensuring a practicaluse. Based on this lot progress estimate, it is possible to determine anoptimal processing method or sequence with reference to specially inputconditions for determining an optimal processing method or sequence.This processing method is transferred to the production line as a workinstruction. As a result, the lots flow efficiently, shortening the workperiod and improving throughput. Accordingly, this improves productivityof semiconductor wafer manufacturing.

The use of this method for manufacturing semiconductor wafers enablesprioritized processing for products with high priorities and efficientprocessing for products with low priorities within an available range.Further, it is possible to optimize the maintenance or a sequence of lotprocessing when an apparatus is being maintained or is to be maintained.

Additional objects and advantages of the invention will be set forth inthe description which follows, and in part will be obvious from thedescription, or may be learned by practice of the invention. The objectsand advantages of the invention may be realized and obtained by means ofthe instrumentalities and combinations particularly pointed outhereinafter.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING

The accompanying drawings, which are incorporated in and constitute apart of the specification, illustrate presently preferred embodiments ofthe invention, and together with the general description given above andthe detailed description of the preferred embodiments given below, serveto explain the principles of the invention.

FIG. 1 exemplifies a result of computing a throughput and a work periodaccording to a prior art using ManSim;

FIG. 2 is a block diagram showing an entire configuration of anelectronic commerce system for semiconductor products according to afirst embodiment;

FIG. 3 is a flowchart explaining a flow f entire processing according tothe first embodiment;

FIG. 4 is a flowchart explaining a flow of entire processing accordingto the first embodiment;

FIG. 5 exemplifies a monitor screen for selecting device specificationchoices;

FIGS. 6A and 6B exemplify monitor screens for entering devicespecifications;

FIG. 7 exemplifies a monitor screen displaying an answer for a priceaccording to a ordered quantity and a delivery time;

FIG. 8 exemplifies a monitor screen for entering a quantity to beordered and a delivery time;

FIG. 9 exemplifies a monitor screen displaying an available deliverytime and price from a device manufacturer;

FIG. 10 exemplifies a monitor screen for renegotiating a delivery timeand a price;

FIG. 11 is a block diagram describing a second embodiment andexemplifying a semiconductor production system used for the electroniccommerce method of the present invention;

FIG. 12 is a schematic diagram illustrating lot progress computationusing a semiconductor production system according to the secondembodiment;

FIGS. 13A to 13E lists input data and output data for the lot progresscomputation using a semiconductor production system according to thesecond embodiment;

FIG. 14 shows a lot flow without awaiting completion of another lotprocessing identified at one point in a virtual factory 13 according tothe second embodiment;

FIG. 15 describes a second embodiment, exemplifying choices availablewhen a lot progress is estimated;

FIG. 16 shows a lot flow by awaiting completion of another lotprocessing identified at one point in a virtual factory 13 according tothe second embodiment;

FIG. 17 describes a second embodiment, showing a procedure for selectingan optimal combination from a plurality of combinations of choicesavailable when a lot is in process;

FIG. 18 shows a configuration of a virtual factory performing lotlook-ahead computation capable of electric power leveling;

FIG. 19 shows characteristic curves for electric power or power usage ofapparatuses registered in the virtual factory 13 performing the electricpower leveling;

FIG. 20 shows an example of condition data for electric power or powerusage of apparatuses registered in the virtual factory 13 performing theelectric power leveling;

FIG. 21 describes a production system according to a third embodiment;

FIGS. 22A to 22C describe a production system without power leveling;

FIGS. 22D to 22F describe a production system with power leveling; and

FIG. 23 describes a third embodiment, showing a procedure for selectingan optimal combination from a plurality of combinations of choicesavailable when a lot is in process.

FIGS. 24A and 24B show electric power values for large-scale andsmall-scale production lines;

FIG. 25 shows the concept of time shift according to the thirdembodiment;

FIG. 26 describes a production system according to a fourth embodiment;

FIGS. 27A to 27C describe a production system without poweroptimization;

FIGS. 27D to 27F describe a production system with power optimization;and

FIG. 28 describes a fourth embodiment, showing a procedure for selectingan optimal combination from a plurality of combinations of choicesavailable when a lot is in process.

DETAILED DESCRIPTION OF THE INVENTION

Embodiments of the present invention will be described in further detailwith reference to the accompanying drawings.

(First Embodiment)

FIG. 2 is a block diagram showing an entire configuration of anelectronic commerce system for semiconductor products according to afirst embodiment of the present invention.

A network 10 is a computer network such as Internet. The systemimplements an electronic commerce via this network 10.

The network 10 connects with a plurality of client terminals 11 and aconnection server 12. The client terminal 11 is operated by a customersuch as a user or a sales representative and can be anInternet-connectable personal computer or mobile telephone. Theconnection server 12 connects with a virtual factory (virtual productionline) 13 referred to as a mini-fab. The connection server 12 exchangesvarious data between the client terminal 11 and the virtual factory 13.The virtual factory 13 is connected to a real factory 14 as a mini-fabwhich actually manufactures semiconductor products as will be describedlater. The virtual factory 13 is implemented by, say, a computer systemand virtually constructs various processes in the real factory 14 on thecomputer. The client terminal 11, the connection server 12, the virtualfactory 13, and the real factory 14 include transfer/reception means 11a, 12 a, 13 a, and 14 a for transferring and receiving variousinformation during communication with the network 10 and the like.

Various information in the real factory 14 is manually or automaticallytransferred to the virtual factory 13. The virtual factory 13 simulatesa lot progress estimate within a specified time range using input datatransferred from the real factory 14 such as lot progress informationand apparatus state information at a specified time. A simulation resultfrom the virtual factory 13 is transferred to the real factory 14 as awork instruction. Based on this instruction, for example, a worker isnotified at which time a given apparatus should complete lot processing,which lot should be input to that apparatus, where to move the completedlot next, or to which transport apparatus the lot should be moved, andthe like.

The following describes an electronic commerce according to thisembodiment with reference to a flowchart in FIG. 3.

The virtual factory 13 regularly manages lot progress situations andapparatus states in the real factory 14 and is prepared to compute a lotprogress equivalent to the real factory 14 (step S1). Specifically, thereal factory 14 transfers information about the lot progress andapparatus states to the virtual factory 13. Under this condition, acustomer such as a user or a sales representative (hereafter justreferred to as the user) connects to the virtual factory 13 via thenetwork 10 and the connection server 12. The user then inputsinformation about an intended product such as an LSI product name,specification, quantity, delivery time, price, and the like (step S2).The input information is transferred to the virtual factory 13.

The virtual factory 13 receives each information entered at step S2 andcomputes a lot progress estimate based on the received information (stepS3). Namely, the virtual factory 13 simulates whether the user-specifiedproduct can be manufactured. Based on the simulation result, the virtualfactory 13 determines whether the product can be manufactured (step S4).When the product can be manufactured, the virtual factory 13 notifiesthe user of it (step S5). As a method of transmitting this informationto the user, data indicating that the product can be manufactured istransmitted to the client terminal 11 via the connection server 12 andthe network 10. Based on the received data, the client terminal 11 usesa monitor screen (not shown) to display the information indicating thatthe product can be manufactured and prompts the user to determinewhether to purchase the product.

Based on the simulation result displayed on the monitor screen, the userdetermines whether to purchase the product (step S6). When thisdetermination is accepted, the transaction is passed. For determiningwhether to purchase the product, namely whether to accept purchase ofthe product, input means (not shown) of the client terminal 11 is usedto enter information indicating whether or not to purchase the product.When the virtual factory 13 receives information indicating purchase ofthe product, it is determined that the transaction is passed. In thiscase, the virtual factory 13 automatically or semiautomatically directsthe real factory 14 to manufacture that product (step S7). In anautomatic case, after it s determined that the transaction is passed,the computer is used for issuing a work instruction to the real factorywithout a human operation. In a semiautomatic case, after it isdetermined that the transaction is passed, an operator for the virtualfactory 13 is prompted to determine whether to issue a work instruction.After interrupt of a human operation such as confirming or entering thework instruction by the operator, the computer is used for issuing awork instruction to the real factory.

Loop A is used when a computation result shows that the intended productcannot be manufactured at step S4. Specifically, loop A modifies theuser's request such as the specification, quantity, delivery time,price, and the like (step S11). Based on this modified information, thevirtual factory 13 re-simulates if such a product can be manufactured.Namely, the lot progress estimate is re-computed under the condition ofthe modified user request (step S3). Based on the computation result, itis determined whether the product can be manufactured (step S4). Whenthe computation result shows that the LSI chip can be manufacturedaccording to the modified user request, this result is transmitted tothe user (step S5). At this time, the content of the modified request isalso transmitted. When the user accepts it, the transaction is passed.The acceptance by the user is performed by the user's action to inputinformation indicative of acceptance by input means (not shown).

Loop B is used when the product cannot be manufactured after modifyingthe user request. Specifically, the lot situation is varied in thevirtual factory 13 (step S12). The virtual factory 13 re-simulateswhether such a product can be manufactured. Namely, the lot progressestimate is re-computed under the condition of the modified lotsituation (step S3). Based on the computation result, it is determinedwhether the product can be manufactured (step S4). For example, theremay be the case where the real factory 14 maintains many products withthe high priority. After these products are completed, it is expected todecrease lots in the real factory 14. In this case, the virtual factory13 simulates whether the product can be manufactured by delaying a lotcasting. When the computation result shows that the LSI chip can bemanufactured according to the condition of the delayed lot casting, thisresult is transmitted to the user (step S5). At this time, the user isnotified of the delayed lot casting and the delivery time. When the useraccepts it, the transaction is passed.

Loop C is used when none of the above-mentioned loops enables themanufacture. Specifically, another mini-fab is selected (step S13) toperform the same operations as mentioned above and determine whether theproduct can be manufactured (step S4). Namely, a lot progress estimateis computed with respect to another mini-fab (step S3). Based on thecomputation result, it is determined whether the manufacture is possible(step S4). When the computation result shows that the manufacture ispossible, this result is transmitted to the user (step S5). When themanufacture is determined to be impossible, the simulation is reexecutedby using loops A and B for finding manufacturable conditions. When themanufacture is impossible on another mini-fab, the transaction isunsuccessful. When another mini-fab is capable of the manufacture, thisresult is transmitted to the user. When the user accepts thenotification from the mini-fab, the transaction is passed.

The above-mentioned processing is described in more detail withreference to a flowchart in FIG. 4 and monitor screens in FIGS. 5 to 11.

When the user makes dial-up access to the connection server 12 from theclient terminal 11, the server 12 requests an ID and a password. Whenthe user enters the ID and the password, the connection server 12accepts the ID and the password if they are correct and then connects tothe virtual factory 13. Concurrently, a monitor screen of the clientterminal 11 displays screen 1 for entering device specifications asshown in FIG. 5.

Screen 1 allows the user to select either of the following.

-   -   (1) Entering a function and finding the device configuration as        a solution    -   (2) Selecting a device configuration from options to configure        the system

As shown in FIG. 6A, screen 2 a is used for specifying device functions.As shown in FIG. 6B, screen 2 b is used for specifying a deviceconfiguration and parts. On screen 2 a, the user enters parts needed forthe system. On screen 2 b, the user selects parts constituting the SOC.

When the user enters the device specification, the server 12 sends it tothe virtual factory 13. Situations of the current lots, manufacturingschedules, and the like are exchanged realtime between the virtualfactory 13 and the real factory 14. Accordingly, the virtual factory 13can perform a simulation in consideration of the currently flowing lotsand a newly input lot. The virtual factory 13 finds a delivery time anda price based on the currently flowing lots and a newly casting lot, andthen sends an answer to the client terminal 11 via the server 12. Atthis time, say, screen 3 as shown in FIG. 7 is displayed on the monitorscreen of the client terminal 11.

When proceeding to the next screen after referencing screen 3, the userselects the NEXT button on screen 3. In response to this buttonselection, the virtual factory 13 displays screen 4 as shown in FIG. 8on the monitor screen of the client terminal 11. Following this screen4, the user enters necessary items such as quantity and delivery time.The virtual factory 13 receives these necessary items (quantity anddelivery time) and searches for a solution which satisfies theseconditions. The virtual factory 13 displays screen 5 in FIG. 9 as afirst solution on the client terminal 11, providing the user with thepossible delivery time and price (first solution). When the firstsolution is satisfactory, the user can place an order. When the firstsolution is unsatisfactory, the user notifies this to the virtualfactory 13. In response to this notification, the virtual factory 13displays screen 6 as shown in FIG. 10 on the monitor screen of theclient terminal 11 for further negotiation with the user. When the userresponds to the negotiation, the virtual factory 13 returns an answer bycomputing, say, how much the price is raised if the delivery time isexpedited. This answer is presented to the user by displaying necessaryinformation on the monitor screen of the client terminal 11. When thesecond transaction provides a satisfactory solution, the user can placean order. When the user places an order, the virtual factory 13 acceptsthe order and finds a detailed delivery time by means of the simulationand returns an answer to the user. Concurrently, the virtual factory 13issues an instruction to the real factory 14. According to thisinstruction, the real factory 14 starts manufacturing the product.

According to this embodiment, the virtual factory 13 is constructed sothat the computer is used to simulate production processes in the realfactory 14 which manufactures semiconductor products. The user such as asales representative or a customer connects to the virtual factory 13via a network 10 and enters an intended LSI product name, specification,delivery time, price, and the like. The virtual factory 13 simulateswhether a specified product can be manufactured, correctly estimatingwhether the real factory 14 can manage the lot progress and manufacturethe product.

When the above-mentioned simulation yields a manufacturable result, thetransaction is passed. A work instruction is issued to the real factory14. Even when the simulation yields an unfeasible result, the virtualfactory 13 varies the semiconductor product's specification, quantity,delivery time, price, lot situation, mini-fab for manufacturing, and thelike. When an allowable solution is obtained, the virtual factory 13passes the transaction and issues a work instruction to the real factory14. This enables electronic commerce for semiconductor products inSOC-oriented mini-fabs and greatly expands business opportunities.

The following paragraphs (1) to (9) describe examples of actualelectronic commerce using the electronic commerce system according tothis embodiment.

(1) A sales representative made the virtual factory 13 simulate anintended product according to a user-requested condition. A simulationresult showed that the product was processed smoothly and could bemanufactured. The transaction was passed and a work instruction wasissued via the virtual factory 13.

(2) A sales representative made the virtual factory 13 simulate anintended product according to a user-requested condition. A simulationresult showed that the product couldn't be manufactured. The process wasre-simulated by changing the delivery time. The result showed that theproduct could be manufactured if the delivery time was delayed for 10days. The user was notified of this result and accepted it. Thetransaction was passed and a work instruction was issued via the virtualfactory 13.

(3) A sales representative made the virtual factory 13 simulate anintended product according to a user-requested condition. A simulationresult showed that the product couldn't be manufactured. The process wasre-simulated by changing the operating frequency specification. There-simulated result showed that some part of choices which can omit someprocedures could be selected. Then the choices were selected thereby toshow shorter processing time and lower cost. In this case, there-simulated result also showed that the product could be manufacturedif the operating frequency specification was reduced for 50 MHz sincethe shorter processing time and lower cost as the re-simulated resultmet the user-requested condition. The user was notified of this resultand accepted it. The transaction was passed and a work instruction wasissued via the virtual factory 13.

(4) A sales representative made the virtual factory 13 simulate anintended product according to a user-requested condition. A simulationresult showed that the product couldn't be manufactured since the resultdidn't meet the user-requested condition. The process was re-simulatedby changing the price. The result showed that the product could bemanufactured on condition that the price was raised for 7% since theraised price met the re-simulated result. The user was notified of thisresult and accepted it. The transaction was passed and a workinstruction was issued via the virtual factory.

(5) A sales representative made the virtual factory 13 simulate anintended product according to a user-requested condition. A simulationresult showed that the product couldn't be manufactured. The process wasre-simulated by changing the quantity and the delivery time. The resultshowed that the product could be manufactured if the quantity wasdecreased by 10% or the delivery time was delayed for 7 days. The userwas notified of this result and accepted it by selecting the latter. Thetransaction was passed and a work instruction was issued via the virtualfactory.

(6) A sales representative made the virtual factory 13 simulate anintended product according to a user-requested condition. A simulationresult showed that the product couldn't be manufactured even if theconditions were changed. The sales representative connected to a virtualfactory capable of simulating another mini-fab and performs the similarcomputation to obtain a manufacturable result. The user was notified ofthis result and accepted it. The transaction was passed and a workinstruction was issued via the virtual factory 13.

(7) A sales representative made the virtual factory 13 simulate anintended product according to a user-requested condition. A simulationresult showed that the product couldn't be manufactured even if theconditions were changed. The result also showed that there was the highpossibility of completing a product with the high priority two or threedays later and enabling the intended product to be manufactured. After await state is enabled, a result was obtained to show that the productcould be manufactured according to the user-requested conditions threedays later. The user was notified of this result and accepted it. Thetransaction was passed and a work instruction was issued via the virtualfactory 13.

(8) Two users made an inquiry almost at the same time. A salesrepresentative made the virtual factory 13 simulate intended productsfor these users according to user-requested conditions. A simulationresult showed that the products could not be manufactured concurrentlyeven if the conditions were changed. Of these users, the salesrepresentative selected the user's product which more profits themini-fab or causes a smaller load to the mini-fab, and made the virtualfactory 13 simulate that product. The result showed that the productcould be manufactured. The users were notified of this result andaccepted it. The transaction was passed and a work instruction wasissued via the virtual factory 13.

As mentioned above in detail, this embodiment provides a networkedelectronic commerce between an agent manufacturing and sellingsemiconductor products and a purchaser purchasing semiconductorproducts. A client terminal 11 operated by the purchaser or his or herproxy is connected to a computer which installs a virtual productionline 13 capable of using the computer to simulate production processesin an actual production line 14 for manufacturing semiconductorproducts. A realtime simulation is performed whether the virtualproduction line 13 can process a purchaser-requested product underpurchaser-requested conditions. It is determined whether the product canbe manufactured under the purchaser-requested conditions. This makes itpossible to correctly estimate whether the real production line canmanage the lot progress and manufacture products, greatly expandingbusiness opportunities in electronic commerce for semiconductorproducts.

(Second Embodiment)

FIG. 11 is a block diagram exemplifying a semiconductor productionsystem according to a second embodiment of the present invention.

There is provided a manufacturing apparatus group in the real factory 14(real production line) which actually manufactures semiconductorproducts including trial products. Products flow along each realproduction line in this real factory 14. A computer in the real factory14 manages a lot progress of each product. For example, a properoperation on the computer screen allows to determine which apparatusprocesses a given lot, whether the lot is being processed, waits forprocessing, or is being transported. In addition to lot progress data,the computer stores information about apparatus states such as active,idle, being maintained, failed, scheduled to be maintained, and thelike.

Various information in the real factory 14 is manually or automaticallytransferred to the virtual factory 13 (virtual production line) via thenetwork as a data transmission medium 16. In a manual operation, acomputer operator for the real factory 14 enters various information. Inan automatic operation, various sensors detect various states in thereal factory 14. The sensed data is transferred to the virtual factory13. Various information in the real production line 14 includes ordervolumes for each production, lot progress situations, apparatussituations (operating states, performance, defect occurrences, QCstates, time until schedule maintenance, and time needed for scheduledmaintenance), worker situations (duty states and working states),product's test results, and the like.

The virtual factory 13 constructs the same functions as for the realfactory 14 on a computer. More specifically, the virtual factory 13 isprovided with a situation assessment program for assessing operatingstates of the real factory 14 based on numeric information and the likerepresenting lot progress situations, apparatus situations, workersituations, and product's test results in the real factory 14. Usingthis situation assessment program, the virtual factory 13 provides afunction of deriving operating situations in the real factory 14 bymeans of simulation. Apparently, means for deriving simulation resultsbased on various information is not limited to software. It may bepreferable to use specified hardware as a constituent element of meansfor deriving simulation results.

The present computer performance makes it impossible to virtuallyimplement same functions as for a large-scale semiconductor factorywhich manufactures approximately fifty to sixty thousand or more wafers.Accordingly, this embodiment aims mainly at a relatively small-scalesemiconductor factory with monthly production of several thousand wafersor less. However, a large-scale semiconductor factory can be dividedinto small portions and can be assumed to be a collection of small-scalefactories. In this case, even the present computer system can providesame functions as for respective small-scale factories.

In the virtual factory 13 according to this embodiment, the computerstores product's process information and information about an apparatusgroup available on real production lines or an apparatus underdiscussion on introduction to the production line. The product's processinformation indicates in which apparatus group a given product isprocessed, how the product is processed, and how long it takes tocomplete each process. A lot progress estimate within a specified timerange is simulated by using input data, namely the lot progressinformation and the apparatus state information at a given timetransferred from the real factory 14.

A simulation result in the virtual factory 13 is transferred to the realfactory 14 as a work instruction via the network as a data transmissionmedium 15. For example, a worker is notified at which time a givenapparatus should complete lot processing, which lot should be cast tothat apparatus, where to move the completed lot next, or to whichtransport apparatus the lot should be moved, and the like. The followingoperations are repeated realtime: transferring various information fromthe real factory 14 to the virtual factory 13; computing management ofan optimal lot in the virtual factory 13; and transferring workinstruction data from the virtual factory to the real factory 14.Paragraphs (1) through (9) to follow explain examples of instructioncontents under various conditions.

The following describes operations of the semiconductor productionsystem in which the virtual factory 13 computes a lot progress usinginformation transferred from the real factory 14. As shown in FIG. 12,the virtual factory 13 is supplied with product recipe information,apparatus information, line situations (lot progress situations), andconditions for determining an optimal lot flowing. The virtual factory13 computes a lot progress based on this input data and outputs a lotprogress estimate result, say, for a month. FIGS. 13A to 13E exemplifiesproduct recipe information (FIG. 13A), apparatus information (FIG. 13B),line situations (lot progress situations, FIG. 13C), conditions fordetermining an optimal lot flowing (FIG. 13D), and a monthly lotprogress estimate (FIG. 13E). FIG. 14 schematically shows a lot flow ata given time.

When the above-mentioned lot progress estimate is computed, there may beprovided two or more choices for various processing methods orsequences. For example, it is assumed that there is provided a batchapparatus which can process a plurality of lots at a time. When a givenlot waits for processing, it is necessary to determine whether toprocess that lot immediately or to wait until another lot arrives. FIG.15 shows an example of this case. FIG. 14 shows the case when choice 1in FIG. 15 is selected. Specifically, this example shows a lot progressfor processing Lot 1 without awaiting a second Lot 2 in a second process(equipment B). FIG. 16 provides a lot progress example when choice 2 inFIG. 15 is selected. Specifically, in FIG. 16, Lot 1 is processed byawaiting the second Lot 2 in the second process (equipment B). In FIGS.14 and 16, a first process is performed by equipment A, the secondprocess is performed by equipment B, and a third process is performed byequipment C.

By comparing FIGS. 14 and 16, the work period for Lot 1 comprising threeprocesses (including the first process to the third process) is longerin FIG. 16 than in FIG. 14. However, the work period for Lot 2 isshorter in FIG. 16 than in FIG. 14. In case the entire process consistsof the three process, the output at time 1 in FIG. 14 is 1 (lot), theoutput at time 1 in FIG. 16 is 0 (lot), the output at time 2 in FIG. 14is 1 (lot), and the output at time 2 in FIG. 16 is 2 (lot). For example,if the date of delivery is time 1, the lot progress in FIG. 14 ispreferable. On the other hand, if the date of delivery is time 2, thelot progress in FIG. 16 is preferable.

On a given apparatus, a low-priority lot waits and a high-priority lotis expected to occur after a specified time. In this case, it isnecessary to determine whether to process the low-priority lot first orto suspend it.

FIG. 17 represents these choices in a tree view. This embodimentcomputes a lot progress estimate for all or part of these choices. A lotprogress estimate result is derived for each choice. Consequently, it ispossible to compute a lot progress estimate according to the way inwhich various choices are selected. Thereafter, as shown in FIG. 17, anoptimal lot progress is selected from the respective lot progressestimate results. For example, such a progress may increase the entirethroughput to shorten a work period, process a prioritized lot in ashort work period, or minimize costs. An operator needs to enter thesecriteria from input means (not shown) to the virtual factory 13. Namely,the operator refers to the lot progress estimate result for each choicedisplayed on the monitor screen connected to the virtual factory 13,sets conditions for extracting lot progresses as mentioned above, anddetermines an optimal lot progress. Here, the virtual factory 13automatically selects an optimal progress from the quantity obtainedfrom lot progress estimate computation results such as an output amountduring a given period, an average work period, a high-priorityproduction output amount, and the like according to priority conditions.Alternatively, an operator can manually select an optimal method fromseveral progress estimate computation results as outputs.

It is unnecessary to derive lot progress estimate results with respectto all choices. It may be preferable to derive them with respect to onlyextraction conditions already specified by the operator.

The virtual factory 13 determines the optimal lot progress, and thenissues the result as a work instruction to the real factory 14.According to this work instruction, as mentioned above, a worker isnotified at which time a given apparatus should complete lot processing,which lot should be input to that apparatus, where to move the completedlot next, or to which transport apparatus the lot should be moved, andthe like. Further, the virtual factory 13 issues an instruction how toselect choices (how to determine processing) when various choices occur.The real factory 14 starts production according to this instruction,allowing efficient operations in the real factory 14.

This embodiment uses the real factory 14 for actually manufacturingproducts and the virtual factory 13 for providing a computer withessentially the same functions as for this real factory 14. The virtualfactory 13 simulates production processes in the real factory 14,allowing efficient operations in the real factory 14. Especially for asmall-scale semiconductor factory with monthly production of severalthousand wafers or less, the virtual factory 13 can accurately simulatevarious processes in the real factory 14. It is possible to strictlyestimate lot progresses and provide efficient operations in small-scalefactories.

The following describes examples of instructions under variousconditions according to this embodiment.

(1) It was assumed that a high-priority lot was to arrive at a givenapparatus 15 minutes later in the real factory 14. This information wastransferred to the virtual factory 13. The virtual factory 13 performedtwo simulations. One was to immediately start processing the currentlot. The other was to suspend the current lot processing and startprocessing after waiting until the high-priority lot arrives. Results ofboth simulations provided a solution that it was appropriate to waituntil the high-priority lot arrives. This result was transferred to thereal factory 14 for issuing a work instruction. Consequently, it hadbecome possible to manufacture high-priority lots in a short workperiod.

(2) When a given apparatus in the real factory 14 required maintenance,a simulation was performed in the virtual factory 13. The simulationprovided an optimal lot progress estimate result for preferentiallyprocessing a lot subject to no or little effect of the maintenance. Thisresult was issued as a work instruction, allowing efficient operationsduring apparatus maintenance in the real factory 14. The maintenancecould be conducted efficiently by displaying the maintenance time,required personnel, replacement parts, supplementary procedures for thenext-to-next maintenance, and the like on the computer screen at a giventime before the scheduled apparatus maintenance.

(3) When the apparatus was expected to fail, a simulation was conductedin consideration of a failure in the virtual factory 13. The simulationresult showed that it was appropriate to preferentially process ahigh-priority product. Based on this result, issuing a work instructionallowed the high-priority lot to be manufactured without delaying thework period. Action against failures could be streamlined by displayingcountermeasures against failures on the computer screen or equivalentmeans, preventing the throughput from degrading or preventing the workperiod from being delayed.

(4) An abnormal value was found in data of a lot which passed a givenprocess. The virtual factory 13 extracted a lot which passes the processand has a possibility of causing abnormal values. This lot was settledas a wait lot. According to an examination thereafter, it was found thatthe lot could not be a conforming article and was rejected. Thus, it hadbecome possible to minimize an effect of process anomaly on products.

(5) A simulation in the virtual factory 13 was used to find an optimalrest break for workers. The simulation result showed that a givenprocess terminated 10 minutes later and no work occured in 70 minutesthereafter and that it was appropriate to take a break during thatperiod. Based on this result, an instruction was issued to take a breakfor 60 minutes after that process. Consequently, workers could take abreak without degrading the throughput or delaying the work period.

(6) When a product to be processed was changed, the virtual factory 13simulated whether available apparatuses were too many or too few inaccordance with changes in apparatuses to be used and the time to usethem. The result showed that an over-and-under problem would occur withrespect to the available apparatuses. A solution for this problem wasfound by minimizing costs or a period for improving or replacingapparatuses to solve. The result was displayed on the computer screen orequivalent means. Based on the result, an optimal procedure of replacingapparatuses was determined and was conducted. Consequently, it hadbecome possible to smoothly change the product.

(7) When determining an apparatus layout in the actual production line,an attempt was made to find an optimal layout according to methods ofminimizing a space, a flow line, the number of workers, and power usage.As a result, a given layout was found to be an optimal solution forminimizing the space and the flow line and decreasing the number ofworkers and the power usage. The use of this layout improvedproductivity.

(8) Due to occurrence of many defects, for example, it was expected todecrease the number of products because wafers or chips for a givenproduct are discarded. In this case, a new lot was input and processedby increasing the priority. Alternatively, a waiting lot was processedby increasing the priority in the middle of processing. Consequently, ithad become possible to prevent conforming articles for the product frombeing greatly decreased.

(9) The virtual factory 13 conducted the inventory management of directand indirect materials. Consequently, it had become possible to decreasethe inventory of direct and indirect materials.

(Modification)

The present invention is not limited to the above-mentioned embodiments.The virtual factory used for the present invention need not necessarilyimplement strictly the same processes as those for the real factory andmay simulate the real factory to some extent. Accordingly, the presentinvention can be applied to more large-scale semiconductor factories byusing current computer systems. The network is not limited to Internetand may be capable of bi-directional data communication. It is possibleto apply the semiconductor production system according to thisembodiment to the electronic commerce method as described in the firstembodiment.

Though the second embodiment explains the semiconductor productionsystem as an example, the present invention is not limited thereto. Thepresent invention is applicable to relatively small-size liquid crystalor electric appliance factories. The present invention is alsoapplicable to automobile factories and chemical plants. The system size(a relatively small-size factory) for the present invention correspondsto such a degree that a computer to be used can perform the same numberof computations for a real line. Namely, this size is equivalent to ascope which can virtually construct the same processing as for the realline. If the computer performance is improved in the future, the presentinvention can be applied to more large-scale systems.

The description of this embodiment assumes that one lot comprisesapproximately 25 wafers, but is not limited thereto. The presentinvention is applicable to any number of wafers starting from one waferper lot.

As mentioned above, this embodiment uses the real factory (realproduction line) for actually manufacturing products and the virtualfactory (virtual production line) for providing a computer withessentially the same functions as for this real factory. Variousinformation in the real factory is transferred to the virtual factory.Based on the transferred information, the virtual factory computes anoptimal way of progressing a lot. Based on this computation result, workinstruction data is transferred to the real factory. The production inthe real factory is based on the transferred work instruction data.Consequently, it is possible to accurately simulate various processes inthe real production line, allowing efficient operations in relativelysmall-scale factories.

When there is provided a plurality of choices, this embodiment computesall or part of these choices. This makes it possible to select optimalchoices according to situations, operating the production system moreefficiently.

(Third Embodiment)

This embodiment concerns a modification of the second embodiment.

The second embodiment described the cases for finding optimal processesaccording to purposes of processing a high-priority lot in a short workperiod and preferentially processing a lot subject to no or littleeffect of the maintenance. The third embodiment finds an optimal processfor achieving an object to perform processing so that electric powerdoes not exceed a preset value.

FIG. 18 shows a configuration of the virtual factory 13 capable ofelectric power (or power usage) leveling. FIG. 18 differs from FIG. 12in that the apparatus's electric power or power usage information andthe electric power or power usage condition are added as input data.FIGS. 19 and 20 provide example data representing profiles andconditions of the electric power or power usage for apparatuses. Thisembodiment exemplifies power restrictions. The fourth embodimentexemplifies power usage restrictions in detail.

The following describes a production system according to this embodimentwith reference to FIGS. 21, 22A to 22F, 23, 24A and 24B. FIGS. 22A to22C describe a production system without power optimization (powerleveling). FIGS. 22D to 22F describe a production system with poweroptimization.

Designing a clean room needs to estimate a rated value of electric powerused for each production apparatus. FIG. 21 shows estimated power valuesin the production system. FIG. 21 diagrams changes of the power and thetemperature in an oxidation furnace. Based on this FIG. 21, the maximumpower value is determined. The rated value of the power is found byadding a specified value to this maximum value. For example, the ratedvalue of the power is set at 60 kw.

The thus found rated value of the production apparatus power is computedfor all production apparatuses in the clean room. A preset value for theentire power is estimated by adding these rated values. There isdesigned the production equipment such as wiring and piping appropriatefor the preset value for the entire electric power.

When a clean room uses a diffusion furnace and an RTA (Rapid ThermalAnnealing) apparatus, an electric characteristic as shown in FIG. 21 isfound for each apparatus. FIG. 22A shows an electric characteristic forthe diffusion furnace. FIG. 22B shows an electric characteristic for theRTA apparatus. Based on these electric characteristics, the total powervalue is computed. FIG. 22C shows a computed power characteristic. Asshown in FIG. 22C, the diffusion furnace and the RTA apparatus causepower peaks overlapping with each other, increasing a total value forthe power peak.

Considering an allowance, the rated value for each production apparatusbecomes several times to dozens of times as large as a value used foractual operations. Not all production apparatuses are in fullproduction. The total power value (preset value) found for theproduction apparatuses tends to be greater than a value duringproduction line operations. If the preset power value is too larger thanthe actual value, the production equipment such as wiring and piping isprovided excessively. This causes a problem of too expensive aconstruction cost for the clean room.

By contrast, the start time for an RTA process using the RTA apparatusis delayed 20 minutes (ΔT) relative to the start time for the diffusionfurnace. Namely, a power characteristic in FIG. 22D overlaps with thatin FIG. 22E. Accordingly, as shown in FIG. 22F, a peak corresponding tototal power values for two apparatuses becomes smaller than that in FIG.22C.

The production system according to this embodiment optimizes the powerand flows lots so that the preset value for the entire power is notexceeded. Specifically, as shown in FIG. 23, a lot in the clean room iscomputed in a look-ahead manner. It is assumed that, say, the diffusionfurnace and the RTA (Rapid Thermal Annealing) apparatus are found to beused concurrently according to look-ahead reading of the lot. In thiscase, it is assumed that the concurrent use of both the apparatuses isexpected to exceed the preset power value. As seen from a referencenumeral 231 in FIG. 23, the maximum power value exceeds the presetvalue. Here, the look-ahead computation is performed to delay the starttime for an RTA process using the RTA apparatus 20 minutes (ΔT) relativeto the start time for the diffusion furnace. In this case, as seen froma reference numeral 232 in FIG. 23, it is found that the maximum powervalue does not exceed the preset value.

A reference numeral 232 in FIG. 23 shows relationship between the timeand the power when choices 2 and 2 a are selected. As seen from acharacteristic curve 232 in FIG. 23, it is understood that the maximumpower value is maintained below the preset value. The present inventionselects choices 2 and 2 a from two possibilities. Namely, this type ofchoices provides lot flowing by shifting power peaks for two apparatusesto level the power.

This enables the production to keep the power below the preset value. Incase of FIG. 22C without power optimization, the preset power valueneeds to be increased when the production is conducted by preventing thepower from exceeding the preset value. By contrast, the case in FIG. 22Fcan decrease the preset power value by means of the optimization. Thisembodiment can derive conditions not exceeding the preset power value bykeeping the preset value low.

An actual production apparatus can be provided with a port where aplurality of lots can wait. A computer can perform a look-aheadoperation to compare processes for each lot. The computer can determinea sequence of processes, load lots from the port to the productionapparatus, and start processing. A production apparatus operator justsupplies lots to the port, saving human resources. Alternatively, it maybe preferable to provide full automation by using an automatic transportsystem.

This production system works as a very effective technique forprocessing waiting lots especially after completion of the apparatusmaintenance. Obviously, the production system is available beforecompletion of the maintenance.

Alternatively, it may be preferable to allow an operator to manuallytransport a lot, mount it on an apparatus, start processing, and thelike according to a work instruction based on the computer's look-aheadoperation.

This production system can be used for large-scale and small-scaleproduction lines, but is particularly effective for small-scale ones.FIG. 24A shows electric power values for a large-scale production line.FIG. 24B shows electric power values for a small-scale production line.A thin line indicates an electric power value before leveling (priorart). A thick line indicates an electric power value after leveling(present invention). A dotted thin line indicates a conventional presetpower value. A dotted thick line indicates a preset power value afterleveling. By comparing FIGS. 24A and 24B, it is understood that adifference between the leveled power value and the power value beforethe leveling is greater for the small-scale production line than for thelarge-scale production line. Namely, the small-scale production lineprovides a greater leveling effect than the large-scale production line.This will cause a difference between the preset power value before theleveling and the preset power value after the leveling. Namely, thesmall-scale production line provides a larger difference between thepreset power value before the leveling and the preset power value afterthe leveling than the large-sale production line. This means that thesmall-scale production line can greatly decrease the preset power valueby means of the leveling.

Thus, it is possible to suppress construction costs for the productionequipment by processing lots so that the power does not exceed thepreset value and by using a small preset power value.

The above-mentioned production system provides an example of adjustingtwo apparatuses. This production system is also applicable when three ormore apparatuses are used or when there are restrictions on the powerfor the entire line.

There is an advantage of applying this embodiment to a given apparatusgroup in a line as described below concretely. Under the powerconditions in FIG. 20, the power for the entire line is limited to, say,500 kW. Further, the power is limited to 150 kw or less for an apparatusgroup defined as group 1 corresponding to a lithography process.Applying a limitation to each group can decrease a scale of wiring froma main power supply in the production line to the correspondingapparatus group, allowing the line construction with low costs.

The above-mentioned example specifies 20 minutes as a time to shift theprocessing. For example, the following method can determine this timeshift. FIG. 25 shows how to find a shift amount for the start time. Asthe start time is shifted, the maximum power value equals the presetvalue after 15 minutes. The maximum power value becomes 90% of thepreset value after 20 minutes. When the start time is shifted 15 minutesor more, the maximum power value does not exceed the preset value. Ifthe shift amount is set to 15 or 16 minutes, an unexpected slightfluctuation in the power may exceed the preset value, causing a powerfailure. This may stop the line and cause a lockout condition or aserious damage. As a solution, this example sets the shift time to 20minutes so that the maximum value becomes 90% or less of the presetvalue. Apparently, this value is not limited to 90%. When a powerfluctuation is large, the value can be 90% or less and the shift timecan be longer than 20 minutes. On the contrary, when a power fluctuationis small, the value can be 90% or more and the shift time can be shorterthan 20 minutes.

The present invention is not limited to the above-mentioned embodiment.In the above-mentioned example, the electric power leveling isdescribed. The equivalent leveling is available for the power usage suchas water (deionized water or cooling water), nitrogen gas, specialmaterial gas, and the like. The detail is described in the nextembodiment.

(Fourth Embodiment)

This embodiment concerns a modification of the second embodiment.

The second embodiment described the cases for finding optimal processesaccording to purposes of processing a high-priority lot in a short workperiod and preferentially processing a lot subject to no or littleeffect of the maintenance. The fourth embodiment finds an optimalprocess for achieving an object to perform processing so that the powerusage does not exceed a preset value.

The following describes a production system according to this embodimentwith reference to FIGS. 26, 27A to 27F, and 28. FIGS. 27A to 27Cdescribe a production system without power usage optimization. FIGS. 27Dto 27F describe a production system with power usage optimization. As anexample of the power usage, the following describes leveling of thedeionized water used for cleaning as a production system process.

FIG. 26 shows a chronological change in the usage amount of deionizedwater for a given treating apparatus. In the chronological changecharacteristic of this figure, the first peak corresponds to a dilutingprocess for adjusting the chemicals density. The second peak occurringlater than the fist peak corresponds to a rinse process.

In case a pre-treatment apparatus and a post-treatment apparatus areinstalled in a clean room, there is found a chronological changecharacteristic for the deionized water usage with respect to eachapparatus as shown in FIG. 26. FIG. 27A shows the chronological changecharacteristic for the pre-treatment apparatus. FIG. 27B shows thechronological change characteristic for the post-treatment apparatus.These chronological change characteristics are used for computing thetotal usage amount. FIG. 27C shows a chronological change characteristicfor the computed total value. As shown in this figure, a peak in thedeionized water usage for the pre-treatment apparatus overlaps with thatfor the post-treatment apparatus, increasing a peak in the totaldeionized water usage. Accordingly, it is necessary to increase a presetvalue for the deionized water usage.

The start time for the post-treatment step using the post-treatmentapparatus is delayed 10 minutes (ΔT) relative to the start time for thepre-treatment apparatus. Namely, a characteristic in FIG. 27D isoverlapped with a characteristic in FIG. 27E. As shown in FIG. 27F, apeak in the total value for two deionized water usage amounts becomessmaller than that shown in FIG. 27C.

The production system for optimizing the power usage flows lots so thatthe maximum value does not exceed the preset value for the entire powerusage. Specifically, look-ahead computation is performed for a lot inthe clean room as shown in FIG. 28. During the lot look-ahead, forexample, it is found that the pre-treatment apparatus and thepost-treatment apparatus are used concurrently. In this case, themaximum value is expected to exceed the preset power usage value if boththe apparatuses are used concurrently. A reference numeral 281 in FIG.28 shows that the maximum value for the deionized water usage exceedsthe preset value. Then, the look-ahead computation is used to delay thestart time of the post-treatment using the post-treatment apparatus by10 minutes relative to the start time of the pre-treatment apparatus.Consequently, as indicated by a reference numeral 282 of FIG. 28, it isfound that the maximum value of the deionized water usage does notexceed the preset value.

In FIG. 28, a reference numeral 282 shows relationship between the timeand the deionized water usage when choices 2 and 2 a are selected. Thecharacteristic curve indicated by the reference numeral 282 shows thatthe maximum value of the deionized water usage is kept under the presetvalue. The present invention selects choices 2 and 2 a from twopossibilities. Namely, this type of choices provides lot flowing byshifting power peaks for two apparatuses to level the power usage.

A technique similar to that described in the third embodiment (FIG. 25)can be used to find an interval (10 minutes in this example) fordelaying the start time for a post-treatment step by the post-treatmentapparatus relative to the start time for the pre-treatment apparatus.

The use of the above-mentioned technique enables the production whichdoes not exceed the preset value for the power usage. In case of FIG.27C without power optimization, the preset power usage value needs to beincreased when the production is conducted by preventing the power usagefrom exceeding the preset value. By contrast, the case in FIG. 27F candecrease the preset power usage value by means of the optimization(leveling). This embodiment can derive conditions not exceeding thepreset power usage value by keeping the preset value low.

The present invention is not limited to the above-mentioned embodiment.In the above-mentioned example, the deionized water is described. Theequivalent leveling is available for the other power usage such ascooling water, nitrogen gas, special material gas, and the like.Consequently, it is possible to downsize the production equipment scaleand suppress manufacturing costs for a clean room. Further, the similarleveling is also available for the duct exhaust such as thermal exhaustand cabinet exhaust. Leveling such an exhaust amount can decrease theexhaust piping size and suppress the power for an air blower or localexhaust.

Especially, it can miniaturize the piping size which is used fordeionized water, a cooling water, and gas. In case the piping size issuch small that it can be bent by implements and the like, it isunnecessary to weld or glue by using jointers. Therefore, the embodimenthas an advantage that workers can install piping easily, thereby toshorten construction term of the clean room, putting term of theequipment in and out, changing term of the layout of each equipment.

Apparently, it is possible to combine the third and the fourthembodiments to provide a small preset value for both the electric powerand the power usage. The equipment scale can be further decreased byflowing lots so that the preset value is not exceeded.

The third and the fourth embodiments explain the system which manages anoptimal lot progress based on the preset value for the electric power orthe power usage. This system can be also used for designing theproduction equipment. Specifically, according to the method ofdecreasing a peak of the electric power or the power usage as shown inFIGS. 22A to 22F and 27A to 27F, the system computes a preset value ofthe decreased electric power or the decreased power usage forapparatuses. The production equipment is designed based on the computedpreset value. This makes it possible to design streamlined small-scaleproduction equipment. Further, the present invention includes a methodof constructing the production equipment based on this design techniquefor the production equipment.

Additional advantages and modifications will readily occur to thoseskilled in the art. Therefore, the invention in its broader aspects isnot limited to the specific details and representative embodiments shownand described herein. Accordingly, various modifications may be madewithout departing from the spirit or scope of the general inventiveconcept as defined by the appended claims and their equivalents.

1-6. (Canceled)
 7. An electronic commerce system, comprising: a virtualproduction line providing a computer with substantially the samefunctions as for a real production line actually manufacturing products;first transferring means configured to transfer various informationabout said real production line to said virtual production line;computing means configured to compute an optimal lot progress on saidvirtual production line based on said transferred information; secondtransferring means configured to transfer work instruction data based ona result of said computation to said real production line; and aconnection server configured to connect said virtual production line toa client terminal via a network, wherein: conditions input from saidclient terminal are transferred to said virtual production line via saidconnection server transfers; realtime simulation is performed todetermine whether a product flows on a virtual production line undertransferred conditions; a simulation result is transferred to saidclient terminal via said connection server; and a transaction iseffectuated based on a simulation result.
 8. A production system,comprising: a virtual production line providing a computer withsubstantially the same functions as for a real production line actuallymanufacturing products; receiver configured to receive variousinformation about said real production line by using said virtualproduction line; computing means configured to compute an optimal lotprogress on said virtual production line based on said receivedinformation; and transferring means configured to transfer workinstruction data based on a result of said computation to said realproduction line.
 9. The production system according to claim 8, wherein:said system realtime and repeatedly receives various information in saidvirtual production line, computes an optimal lot progress in saidvirtual production line, and transfers work instruction data from saidvirtual production line to said real production line.
 10. The productionsystem according to claim 8, wherein: information transferred from saidreal production line to said virtual production line includes at leastone of an order volume for each production, lot progress situation,apparatus situation, worker situation, and product test result.
 11. Theproduction system according to claim 8, wherein: said computing meansconfigured to compute an optimal lot progress finds a plurality of lotprogress estimate results for each condition of progressing said lot andextracts at least one of said plurality of progress estimate results.12. The production system according to claim 11, wherein: said computingmeans configured to compute an optimal lot progress is provided withmeans for displaying said plurality of lot progress estimate resultsfound and selecting at least one computation result.
 13. The productionsystem according to claim 11, wherein: said computing means configuredto compute an optimal lot progress extracts one or more of saidplurality of lot progress estimate results based on user-inputextraction condition.
 14. The production system according to claim 8,wherein: said computing means configured to compute an optimal lotprogress computes a solution for providing the shortest manufacturingperiod and the maximum production volume.
 15. The production systemaccording to claim 8, wherein: said computing means configured tocompute an optimal lot progress finds a solution according to which aproduct with a higher priority provides a shorter manufacturing periodbased on priorities assigned to ordered products.
 16. The productionsystem according to claim 8, wherein: said receiver receives a testresult of a product manufactured in said real production line to saidvirtual production line and said computing means determines the nextinput schedule by referencing an order volume for the relevant product.17. The production system according to any one of claims 8 to 16,wherein: said real production line is a semiconductor production line.18. The production system according to claim 8, further comprising:second computing means configured to compute at least one timedependency of electric power and power usage based on said receivedinformation, wherein: said computing means configured to compute anoptimal lot progress is based on the time dependency obtained by saidsecond computing means configured to compute the time dependency andcompute a lot progress based on a condition not exceeding at least oneof an electric power value and a power usage value specified for theproduction line.
 19. The production system according to claim 18,wherein: said power usage includes at least one of deionized water,cooling water, semiconductor material gas, semiconductor manufacturinggas, semiconductor manufacturing liquid, and semiconductor manufacturingsolid.
 20. A manufacturing method of using a virtual production lineprovided with substantially the same functions in a computer as for areal production line actually manufacturing products, performingsimulation in a virtual production line, and enabling efficientoperations in a real production line, said method comprising the stepsof: receiving various information about said real production line bymeans of said virtual production line; computing an optimal lot progressin said virtual production line based on said received information; andtransferring work instruction data based on a result of said computationto said real production line.
 21. The manufacturing method according toclaim 20, further comprising the step of: starting production in saidreal production line based on said work instruction data.
 22. Themanufacturing method according to claim 20, wherein: said methodrealtime and repeatedly receives various information in said virtualproduction line from said real production line, computes an optimal lotprogress in said virtual production line, and transfers work instructiondata from said virtual production line to said real production line. 23.The manufacturing method according to claim 20, wherein: informationreceived from said real production line to said virtual production lineincludes at least one of an order volume for each production, lotprogress situation, apparatus situation, worker situation, and producttest result.
 24. The manufacturing method according to claim 20,wherein: said step of computing an optimal lot progress computes asolution for providing the shortest manufacturing period and the maximumproduction volume.
 25. The manufacturing method according to claim 20,wherein: said step of computing an optimal lot progress computes asolution according to which a product with a higher priority provides ashorter manufacturing period based on priorities assigned to orderedproducts.
 26. The manufacturing method according to claim 20, wherein:said receiving step receives a test result of a product manufactured insaid real production line to said virtual production line and saidcomputing step determines the next input schedule by referencing anorder volume for the relevant product.
 27. The manufacturing methodaccording to any one of claims 20 to 26, wherein: said real productionline is a semiconductor production line. 28-31. (Canceled)